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Ambient Temperature · 6-D piezoelectric Positioning System

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Piezo · 6D Positioning System— HP120.Lab.O / .R (Colse-loop)

Piezoelectric motion@RT solutions — “.Lab Series“ Well packaged piezoelectric motion unit

6 degrees; Parallel design; More stable.

Features:

• Super silent，20 kHz drive frequency

• Size: Ø126 × 74 mm

• Close loop · Resistive encoder (.R) & Optical encoder (.O) optional

• High precision · Resolution (.O) 1 nm、10 nm Optional

• Economical · Resolution(.R) 100-200nm

• Minimum step size < 10 nm

• 20 mm (XY); 10 mm (Z); 20 ° (ΘxΘy); 30 ° (Θz)

• Maximum vertical load: 500 g

• Non magnet（.NM）、High Vacuum（.HV）& Ultra-high Vacuum（.UHV）optional

HP120.Lab.O / .R Piezo·6D Positioning System — Technical Parameters