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Piezoelectric · Large-range piezoelectric scanning — Carrier.S100-OB.Z

Piezoelectric motion@RT solutions — “.Carrier Series“ Large Travel Scanning - Precision Optics, Semiconductor Characterization

Piezo-Linear Stage with compact shape and no compromise on power performance;

while guaranteeing a premium price space.

Product Features

• Z-directional motion range of 200 um

• Fastest stabilization time (90% position stabilization) within 20ms

• Closed-loop positioning accuracy better than 1 nm

• Maximum load 500 g

• Controller compatible with MultiFieldsⓇ Motion Controller - Archimedes Series

• Supports non-magnetic (.NM) and high vacuum (.UHV) option upgrades

2D - Dimensional drawing

Carrier.S100-OB.Z Objective autofocus scanning table — Specification

Optional Versions ⇨		Default
		.NM version, non-magnetic; .HV version, high vacuum; .UHV version, compatible with 2E-11 mbar
1 Orientation of movement		Z axis
2 Travel range		100 um
3 Linearity		0.02%
4 Pitch / Yaw		30 urad
5 Position encoder		Resistive Sensor
6 Sensor noise		0.3 nm
7 Z axis resolution, open-loop		0.1 nm
8 Stabilize time (90% Position)		15 ms
9 Rigidity		0.4 N/um
10 Resonant frequency (no load)		650 Hz
11 Resonant frequency (150g load)		275 Hz
12 Weight		270 g
13 Mainbody		Stainless steel 304，Aluminum alloy

Ambient Temperature · Carrier.S100-OB.Z Objective autofocus scanning table