Ambient Temperature · Carrier.S200.XY Large-range piezoelectric scanning table

Optional Versions ⇨

Default

.NM version, non-magnetic;

.HV version, high vacuum;

.UHV version, compatible with 2E-11 mbar

1            Bottom size * height

180 mm × 150 mm × 20 mm

2            Main Material

Aluminum alloy

3            Hollow perforation

80 mm × 60 mm

4            Travel

200 um × 200 um

5            Closed-loop resolution

< 1nm

6            Maximum load

500 g

7            Closed-loop sensors

Capacitive

8            Capacitance accuracy

0.3 nm

9            Piezoelectric capacitance (X, Y)

6.5 uF

10           Operating temperature

15 – 40 °C

11           Quality

1 kg

12           Installation

Automatic compatibility of threaded holes