DSR300 Micro-nano Device Spectral Response Measurement System

DSR300 series micro-nano spectral response measurement system is dedicated to low-dimensional materials, providing high-precision spectral scanning and photo current scanning measurement. 40 m detection spot make the system can measure the minimum size 100 μm sample. Ultra-high stability light source provide the high accuracy; Multiple light sources can be integrated in the system to measure a variety of detectors. The friendly software is easy to use and automatically control the device to operate.

Function：

■ Spectral Responsivity

■ External Quantum Efficiency

■ Bias Voltage IT Curve

■ LBIC Mapping

■ Response Linearity Test

Main Technical Parameter
Light Source

Xenon light Source	Supercontinuum light source	CW laser	Pulsed laser
Spectral Range: 250 - 1800 nm Instability: ＜ 1%	Spectral Range: 400 - 2400 nm Frequency: 0.01 - 200 MHz Pulse width: 100 ps	Optional Wavelength: 405 nm, 532 nm, 633 nm, 808 nm, 980 nm; Instability: ＜ 1%	Optional Wavelength: 375 nm, 405 nm, 488 nm, 785 nm, 976 nm; Pulse width: 100 ps Frequency: 1-20 MHz

Micro lens

10x objective lens (Standard )	50x objective lens	50x UV objective lens	40x reflective objective lens
Work distance＞17 mm NA: 0.42 Spectral Range: 350 - 800 nm	Work distance＞17 mm NA: 0.42 Spectral Range: 480 - 1800 nm	Work distance＞12 mm NA: 0.42 Spectral Range: 240 - 500 nm	Work distance＞7.8 mm NA: 0.5 Spectral Range: 200 nm - 20 um

Data Acquisition Unit

Lock-in Amplifier	Keithley2612B	Keithley2636B
Frequency: 20 Hz - 1 KHz Drift: ＜ 0.1°/℃ below 10 kHz Voltage or Current Input mode 1nV to 1V full-scale sensitivity Current gain 106 or 108 V/A Dynamic Reserve >100 dB Display: X、Y、R、θ	Current Range: 100 nA/ 1 A Minimum signal: 1 nA Noise: 100 pA Resolution: 100 fA Channel: 2	Current Range: 1 nA/ 1 A Minimum signal: 10 pA Noise: 1 pA Resolution: 10 fA Channel: 2

Cryostat

Temperature Range: -196℃ - 600℃ Temperature Resolution: 0.1℃ Clear Hole Diameter: 24mm Sample Area: φ22mm Working Distance: 4.5 - 12.5 mm Air-tight sample chamber, can be filled with protective gas, independent temperature control.

Probe Station

4 probe holders with 20/10 micron tip 2 meters long triaxial cable, leakage current is less than 1 pA Vacuum adsorption sample stage X,Y, Z adjustable probe holder, 12mm travel range, 0.75um resolution

LBIC Maapping

XY travel range 50 mm, resolution 5 um, scanning spatial resolution: 1 um.

3D adjustable high stability probe station

The system can support four light paths, three are built-in light paths,one is external light path.

The external light path can provide tunable broadband monochromatic light.

Testing Curves:

The IV curves under different light intensities

Linearity test curve

Lifetime measurement curve(rise time, fall time)

40 um spot @ 550 nm @ 50 x objective lens with 200 um fiber

70 um spot @ 550 nm @ 50 x objective lens with 400 um fiber

5 um spot @ 375 nm picosecond pulsed laser @ 40 x objective lens

The monochromatic light energy output curves of UV enhanced xenon arc light source and EQ99 light source, with 40 x reflective objective lens, 300 mm focus length spectrograph under 1200 g/mm@ 300 nm blaze wavelength grating, spot diameter is 80 um.

Probe Light Power @1200/300